《Table 1 Parameters of the sputtering process》
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《Microstructure and corrosion resistance of sputtered TiN coatings on surface of Zr-4 alloy》
The total pressure was about 0.5 Pa.To perform the sputtering process in a nitrogen rich environment,the flow rate of Ar was maintained at 40 cm3/min,and the flow rate of N2 ranged from 0 to 10 cm3/min.The specific synthesis conditions are summarized in Table1.
图表编号 | XD0011320400 严禁用于非法目的 |
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绘制时间 | 2018.03.01 |
作者 | 廖帮亮、MA Jian-guang、ZHU Wei-hua、ZHU Hong-mei、YANG Kai、LIU Yan-hong、LI Huai-lin、WANG Xiao-jing、王新林 |
绘制单位 | School of Mechanical Engineering, University of South China、School of Mechanical Engineering, University of South China、School of Electrical Engineering, University of South China、School of Mechanical Engineering, University of South China、School of Mecha |
更多格式 | 高清、无水印(增值服务) |