《Table 1 Deposition parameters of Al2O3/Al reactive sputtering》

《Table 1 Deposition parameters of Al2O3/Al reactive sputtering》   提示:宽带有限、当前游客访问压缩模式
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《γ-TiAl合金表面Al_2O_3/Al复合涂层的抗高温熔盐腐蚀性能(英文)》


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The Al2O3/Al composite coatings were fabricated in a magnetron sputtering system.An aluminum plate with a purity of 99.99%prepared by powder metallurgy was used as the sputtering target.Pure Ar and O2 were used as the working and reactive gases,respectively.The Al2O3/Al composite coating was deposited in two steps,Al deposition and Al2O3reactive deposition,using the set-up parameters in Table 1.After deposition,the coated specimens were heat treated in a vacuum furnace(10-4 Pa)at 600°C for 10 h before corrosion test.