《Table 1 Process parameters of the Cr-transition coating》

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《锆管表面沉积Cr-TiAlSiN复合涂层的表面形貌与性能研究（英文）》

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A TSU-650 type multi-function coating machine was used as the coating deposition equipment.The Cr-transition coating was prepared with a circular Cr target of arc evaporation，the size of which is 100 mm×18 mm and the purity of which is 99.99%，by the method of double multi-arc ion plating.The sputtering gas was argon and nitrogen and the chamber was evacuated to 4.0×10-3 Pa.Before depositing，the glow cleaning was carried out by applying negative bias of 1000 V and the duty ratio of 70%to the substrate.The process parameters of the deposition are shown in Table 1.