《Table 3 Number and distribution of large particles on the sur-face of the coatings prepared with di

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《锆管表面沉积Cr-TiAlSiN复合涂层的表面形貌与性能研究（英文）》

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Fig.3 and Fig.4 show the micro-morphology processed by Image J software，which has a good correspondence with the original morphology，providing a guarantee for the porosity analysis and the statistics of the quantity of large particles on the coatings.Analysis results are shown in Table 3，and it can be learned that the quantity of large particles on the surface of the coatings obtained by multi-arc ion plating process is larger，but the surface porosity is lower.The larger number of large particles on the surface is probably resulted from the low flow of nitrogen and the large multi-arc current，which makes evaporation rate of the target too fast，resulting in a lot of metal droplets without ful ionization，and thus causing a large number of droplets to deposit on the substrate；in this way，large particles are formed[10].Low surface porosity may be due to the high incident energy of particles sputtered by multi-arc ion plating，making the density of coating better[12].The high ionization rate of the target makes other plasmas have the advantage to react with each other，making the coating more uniform.There are a small number of large particles on the surface of the coatings prepared with intermediate frequency unbalanced magnetron sputtering process，which is likely to be affected by the sputtering current.The smaller the sputtering current，the smaller the kinetic energy of the particles’migration.The small kinetic energy of the particles deposited on the substrate reduces the probability of the formation of large particles[13].In addition，by the effect of the magnetic field of the chamber，it is more difficult for the ionized particles to deposit on the surface of the substrate with the magnetic field weakening，so that the deposition rate is low and the obtained coating is thin，resulting in a coating surface of high porosity[14].