《Table 3 Comparison of essential parameters among the MEMS ring probe, I2 probe and the cantilever p

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《环形、矩形及I2形MEMS原子力显微镜探针的力灵敏度（英文）》

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According to equation（2），Fmcan be improved by the followings methods.The first method is increasing the resonance frequency（f0）.It is agreed that the high resonance frequency AFM probe is necessary to increase the scanning speed and improve the imaging quality[4].The second method is decreasing the effective stiffness（keff）.The effective stiffness is related to the resonance frequency of the resonator.Theoretically，a resonator with a low value of kefftends to have low value of f0，which partially compensates for the increase of the force sensitivity.Practically，the force sensitivity between the soft and stiff cantilever probes is not significant.For example，Table 1 shows the comparison between the commercial stiff and soft cantilever probes produced by Olympus[14].There is no significant difference between the minimum detectable forces measured for these two commercial cantilevers.