《Table 1 Comparison of common measurement methods》

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《用于形貌测量的反射式光纤传感器研究综述（英文）》

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At present，the main methods of non-contact surface topography measurement are laser trigonometry[5]，focusing method[6]，scanning phaseshifting method[7]，interferometry[8]and two microscopy methods in atomic level[9].The measurement modes，characteristics and accuracy of these methods are shown in Table 1.