《Table 2.Material Properties of Fused Silica and Laser Ablation Parameters》

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《Numerical model and experimental demonstration of high precision ablation of pulse CO_2 laser》

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A transient，two-dimensional，axisymmetric model based on the finite element method is developed to simulate the process of material heating，melting，and evaporation.In this work，the heat transfer model is used to compute the temperature.Phase change kinetics is employed to track the solid-melt interface.The fluid flow model coupled with the heat transfer model is utilized to calculate the flow velocity of the melt pool.The deformed geometry interface is applied to predict the surface profile of laser ablation.The computational model is presented in Fig.1.The governing equations and boundary conditions are labeled in Table 1.